I wouldn't spray anything on those flowering plants. They're not microscopic, just stay vigilant and search and pick them off by hand. As for the grow area, you don't need to do anything at all to clean for them. You may have brought in much worse pests that you can't see though so a thorough cleaning would be prudent.
All it took was 1 or 2 moths to get into my grow room to wreak havoc on my last auto run. Moths and butterflies are not friends to cannabis, kill them on sight and don't let them get away. Afterwards stay extra vigilant as they may have laid eggs in your plants. Most of the ones we deal with will only lay one tiny egg in the top of each plant or top. Again, maybe not every top but they typically only lay one egg at a time so you won't have several caterpillars on one plant or top unless you're dealing with more than one egg layer or one of the much less common species that lay several eggs in a cluster at one time.
They do a lot of damage in a short time but they are probably the easiest pest to deal with other than fungus gnats since they're big enough to see and with only one per plant once you've found the culprit and removed it, that plant is probably safe from then on. I wouldn't use chemicals to deal with them, especially in flower.